超高精度真空压力PID控制装置

Ultra High Precision Vacuum Pressure PID Controller

上海依阳公司推出的超高精度真空压力PID控制装置是一种采用电气比例阀，但通过外置超高精度传感器和PID控制器，实现真空压力超高精度控制的装置，由此可实现真空、微正压、高压和超高压范围内的精密控制，可实现优于±0.1%的真空压力超高精度控制，填补了国内工业应用领域内超高精度真空压力控制的空白，并可完全替代国外相关产品。特别是超高精度真空压力PID控制装置还可与微泄漏阀搭配，可实现超高真空条件下的微流量调节和超高真空度精密控制。

一、微正压超高精度PID控制装置

Micro Positive Pressure Ultra High Precision PID Control Device

微正压控制装置主要包括微正压电气比例阀和相应量程的外接超高精度压力传感器，通过超高精度的PID控制器可实现优于±0.1%的精密控制。

二、传统电动阀门执行器的升级换代

Upgrading of Traditional Electric Valve Actuators

传统电动调节器一般是电动致动器、电动阀门定位器和阀门结构，结合传感器和PID控制器构成单回路压力或温度控制系统。存在问题是运行速度慢、对PID控制信号响应滞后，压力和温度波动大。

采用阀门定位器形式的电动减压阀蒸汽温度控制结构

传统阀门定位器形式的电动减压阀蒸汽温度控制波动

升级换代技术则采用串级控制结构，温度传感器、气动减压阀、电气比例阀和串级PID调节器组成一个双回路闭环控制系统。新型控制系统明显提高控制精度和缩短控制时间。

传感器、超高精度PID控制器、电气比例阀和气动减压阀构成的串行控制结构

串级控制系统的温度波动

三、电气比例阀超高精度压力PID控制装置

Ultra-High Precision Pressure PID Control Device of Electric Proportional Valve

电气比例阀超高精度压力控制装置主要包括电气比例阀和相应量程的外接超高精度压力传感器，通过超高精度的PID控制器可实现优于±0.1%的精密控制。

四、先导式气动减压阀（背压阀）的精密高压控制

Precision High Pressure Control of Pilot Pneumatic Pressure Reducing Valve (Back Pressure Valve)

五、连续流反应器和微通道反应器的精密压力控制

Precise Pressure Control Solutions for Continuous Flow Reactors and Microchannel Reactors

六、超低漏率可变泄漏阀（微流量调节阀）及其超高真空度控制装置

Ultra-Low Leakage Rate Variable Leak Valve (Micro-Flow Regulating Valve) and Ultra-High Vacuum Control Device

七、微流控芯片压力驱动进样系统的压力和流量超高精度控制装置

Ultra-High Precision Control Device for Pressure and Flow of Microfluidic Chip Pressure-Driven Sampling System

八、离体肺真空压力（正负压）通气装置

Ex Vivo Lung Vacuum Pressure (Positive and Negative Pressure) Ventilation Device

九、应用视频

Appplication Video

真空控制系统在PVT法碳化硅单晶生长设备中的应用——国产化替代解决方案

十、应用文章

Appplication Notes

（1）SMC IRV系列手动真空调节阀低压控制性能考核试验

SMC IRV Vacuum Regulator Low Pressure Control Performance Assessment Test

（2）工业应用中0.1%超高精度PID控制器的实现及其关键指标分析

Realization of 0.1% Ultra-high Precision PID Controller in Industry and Analysis of Its KeyParameters

（3）表压0.1~0.6MPa范围内0.1%超高精度压力控制解决方案及其考核试验结果

0.1% Ultra-High-Precision Pressure Control Solution in the Range of Gauge Pressure 0.1~0.6MPa and Its Assessment Test Results

（4）微正压0.1MPa以下的超高精度PID控制及其演示验证结果

Ultra High Precision PID Control with Micro-Positive Pressure Below 0.1MPa and Its Demonstration and Verification Results

（5）压力传感器和电气比例阀测控精度的基本概念及其使用方法

Basic Concept and Application Method of Measurement and Control Accuracy of Pressure Sensor and Electric Proportional Valve

（6）三种典型电气比例阀压力控制精度的对比考核试验

Contrastive Assessment Test of Pressure Control Accuracy of Three Types of Electrical Proportional Valves

（7）PVT法碳化硅SIC晶体生长工艺高精度压力控制解决方案及其配套装置的国产化替代

High Precision Pressure Control Solution for PVT Method  SIC Crystal Growth Pocess and Localized Replacement of Its Supporting Equipments

（8）采用电气比例阀串级控制法实现化学机械抛光（CMP）的超高精密压力控制

Ultra-High Precision Pressure Control of Chemical Mechanical Polishing is Realized by Cascade Control of Electric Proportional Valve

（9）超长管件注塑过程中采用串级控制实现高压压力精密控制的解决方案

Solution of Cascade Control to Realize High-Pressure Precision Control in the Injection Molding Process of Super-Long Pipe Fittings

（10）超高温高压流变仪用艾默生TESCOM ER5000压力控制系统的国产化替代方案

Domestic Alternative Scheme of TESCOM ER5000 High Precision Pressure Control System for High Pressure Rheometer

（11）彻底讲清电气转换器（I-P电流型、E-P电压型）与电气比例阀的区别

Thoroughly Explain the Difference Between Electrical Converter (I-P Current Type and E-P Voltage Type) and Electrical Proportional Valve.

（12）使用压力控制器和电气比例阀组成串级回路实现一次性生物反应器袋安全高精度快速充气

Using Pressure Controller and Electric Proportional Valve to Form Cascade Loop to Realize High-Precision Inflating Single Use Bioreactor Bag

（13）采用电气比例阀代替电动阀门执行器实现轮胎硫化过程中的饱和蒸汽外温变温精密控制

Application of Ultra-Precision PID Cascade Controller and Electric Proportional Valve in Temperature Control of Tire Vulcanization Saturated Steam.

（14）低温烹饪装置中高精度压力和温度控制的解决方案

Solution of High-Precision Pressure and Temperature Control in Sous Vide Device

（15）采用压力串级控制系统实现气动马达的精密调节

Solution to Realize Hgh Precision Regulation of Pneumatic Motor by Pressure Cascade Control Method

（16）PID控制器的遥控设定值功能及其应用

Special Functions of Super Precision PID Controller Part 1: Remote Set Point Function and Its Application

（17）阀门定位器的技术发展及其更新换代——电气比例阀

Technical Development and Upgrading of Valve Positioner—— Electric Proportional Valve Pressure Controller

（18）采用泊肃叶压力衰减法代替塞规进行高精度孔径测量的解决方案

The Solution of Using Poiseuille Pressure Decay Method to Replace Plug Gauge for High Precision Aperture Measurement

（19）半导体低温工艺中制冷系统的压力和温度准确控制解决方案

Solution for Accurate Control of Pressure and Temperature of Refrigeration System in Semiconductor Low Temperature Process

（20）反重力调压铸造炉真空压力控制技术——高精度快速压力调节解决方案

Vacuum Pressure Control Technology of Counter Gravity Casting —— High Precision and Fast Pressure Regulating Solution

（21）医用导管和球囊成型过程中的自动和手动精密压力控制

Automatic and Manual Precise Pressure Control In Medical Catheter and Balloon Molding Process

（22）电动针阀和电气比例阀在流动液氮气体低温温度控制中的应用

Application of Electric Needle Valve and Electric Proportional Valve in Low Temperature Control of Flowing Liquid Nitrogen Gas

（23）气囊抛光中高精度位移和压力控制的解决方案

High Precision Displacement and Pressure Control Solution in Gasbag Polishing

（24）啤酒发酵罐用的可编程全自动精密压力控制装置

Programmable Fully Automatic Precision Pressure Control Device for Beer Fermentation Tanks

（25）正负压差控制方法在X射线探测器薄膜窗口材料弹性模量测量中的应用

Solution of Vacuum Pressure Control in Mechanical Properties Test of Window Film Material of X-ray Senor

（26）半导体热处理设备微环境中的精密微正压控制解决方案

Precise Micro-Positive Pressure Control Solution In Micro-Environment of Semiconductor Heat Treatment Equipments

（27）印刷和喷绘过程中高精度油墨流量和压力的串级控制解决方案

Cascade Control Solution of High Precision Ink Flow and Pressure in Printing and Inkjet Equipment

（28）隐形牙齿矫治器热成型工艺中的正负压力精密控制解决方案

Precision Control Solutions for Positive and Negative Pressure in the Thermoforming Process of Invisible Dental Appliances

（29）超高真空度控制用安捷伦和VAT电动可变泄漏阀的国产化替代解决方案

Domestic Alternative Solution of Agilent and VAT Electric Variable Leakage Valve for Ultra-High Vacuum Control

（30）全量程真空压力综合测量系统的高精度控制解决方案

High-Precision Control Solution of Full-Range Vacuum Pressure Comprehensive Measurement Aystem

（31）连续流反应器和微通道反应器的精密压力控制解决方案

Precise Pressure Control Solutions for Continuous Flow Reactors and Microchannel Reactors

（32）微流控压力泵和注射泵性能的详细分析和比较

Detailed Analysis and Comparison of the Performance of Microfluidic Pressure Pump and Injection Pump

（33）微流控芯片气压驱动进样系统中高精度流量调节的串级控制解决方案

Cascade Control Solution of Ultra-High Precision Flow Regulation In Microfluidic Chip Air-Driven Sampling System

（34）离体肺通气装置中真空和压力控制的解决方案

Solution of Vacuum and Pressure Control In Ex Vivo Lung Ventilation Device

（35）术中管理的气管导管套囊压力自动控制解决方案

Automatic Control Solution for Intraoperative Management of Endotracheal Tube Cuff Pressure

（36）透射电子显微镜样品杆流体输送中的真空压力和流量精密控制解决方案

Precise Control Solution of Vacuum Pressure and Flow Rate in Fluid Transportation of Transmission Electron Microscope Sample Holder

（37）ARC加速量热仪的温度和压力跟踪控制解决方案

Temperature and Pressure Tracking Control Solution of ARC Accelerated Rate Adiabatic Calorimeter

（38）低压沸腾传热两相散热器中压力和温度精密控制解决方案

Precise Control Solution of Pressure and Temperature in Low Pressure Boiling Heat Transfer Two-Phase Heat Sink

（39）采用夹管阀实现无菌流体系统中的高精度压力和流量控制解决方案

Solution for High-Precision Pressure and Flow Control in Aseptic Fluid Systems Using a Pinch Valve

（40）光声法气体检测系统的高精度压力控制解决方案

High Precision Air Pressure Control Solution of Photoacoustic Gas Detection System